MiND Laboratory

Design, simulation, fabrication, and characterization of MEMS technology-based sensors and actuators

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8. MEMS gravimeter

• Simulation and characterization

• Design of thermal actuator for MEMS gravimeter

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7. Electronics devices for memory applications

• Fabrication and characterization of

  • OTP (one-time programable devices, MOSCAP, Diodes)

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6. Piezoresistive pressure sensors

• Design and simulation

• Analytical modeling

• Fabrication

• Characterization

  • Investigation of temperature-induced effects

  • Study of radiation-induced effects

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5.Accelerometer

• Design and simulation

• Analyzed various possible microstructures

• Analytical modeling

• Fabrication using MetalMUMPs process

• Characterization

• Explored fabrication using SU-8

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4. Micro Hot Plate (MHP)

• Design and simulation

• Fabrication using PolyMUMPs process

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3. MEMS Energy Harvester

• Design and simulation

• Fabrication using PiezoMUMPs process

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2. Technical Textile

• Development of energy harvester textile

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1. Microtensiometers for water potential measurements

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